Point defects and dopant diffusion in silicon - APS Link ... Point defects and dopant diffusion in silicon. Rev. Mod. Phys. 61, 289 – Published 1 April 1989. P. M. Fahey, P. B. Griffin, and J. D. Plummer. PDF · Export ...
Nonequilibrium point defects and dopant diffusion in carbon ... Nonequilibrium point defects and dopant diffusion in carbon-rich silicon. Phys. Rev. B 64, 073202 – Published 30 July 2001. H. Rücker, B. Heinemann, and R.
Diffusion Mechanisms and Intrinsic Point- Defect ... - Courses dopant diffusion in silicon, the properties of intrinsic point defects like vacancies (V) and self-interstitials (I), and the interactions among different point defects.
Dopant Diffusion Revisited •Dopant interactions with Point Defects of Si substrate ... Dopant Diffusivity affected by Point Defect Concentration ..... + is diffusivity D+ for undoped silicon.
Point defects and dopant diffusion in silicon - INSPIRE-HEP (7) The role of primary point defects in the degradation of silicon detectors due to hadron and lepton irradiation - Lazanu, I. et al. Phys.Scripta 74 (2006) 201-207 ...
Point Defects and Dopant Diffusion in Silicon - Google Books Point Defects and Dopant Diffusion in Silicon. Point Defects and Dopant Diffusion in Silicon. Authors: Fahey, Paul Martin. Affiliation: STANFORD UNIVERSITY.
Point defects and dopant diffusion in silicon Point defects and dopant diffusion in silicon. P. M. Fahey,* P. B. Griffin, and J. D. Plummer. Integrated Circuits Laboratory, Stanford University, Stanford, ...
On the Diffusion of Point Defects in Silicon - Jstor understand diffusion mechanisms in silicon so that dopant redistribution may be .... for point defect and dopant diffusion simultaneously) and because heuristic ...
3.1.3 Intrinsic Dopant Diffusion Next: 3.1.4 Extrinsic Dopant Diffusion Up: 3.1 Diffusion in Silicon Previous: ... Note, that we make no difference whether the dopant or the point-defect is at an ...
Dopant diffusion in Si and SiGe - DiVA Phosphorus and Boron Diffusion in Silicon Under Equilibrium Conditions ..... The individual dopant-point defect complexes diffuse with a diffusivity DAI or DAV,.